TECH & PRODUCTS
TECH & PRODUCTS
PVD Coating/Target
PVDCoating / Target
Multi-Functional Coating /
Multi-Component Alloy Targets
Multi-Component Alloy Targets
- Colored alloy targets
(silver, pink gold, yellow gold, platinum, dark blue, etc.) - Low-friction & wear-resistant coating targets (ZCS, etc.)
- Hard coating for tools/molds (TiAlCr, AlCr, etc.)
- Targets for advanced display devices
(planar & cylindrical rotary Mo, MoTi targets, etc.)
- Precious metal targets (Ag, Pt, Au, etc.)
- Ceramic targets (Y2O3, YSZ, GeTe, etc.)
- Customization available
Multi-Component Alloy
Target Manufacturing
Technology
- Multi-component alloy target material design and high-density target formation technology development (first in Korea)
- Mass production of multi-component targets for automotive parts (Hyundai/KIA) & expansion of applications to display/semiconductor/electronics/tools/molds industries (4 applied & 2 granted/registered patents)
Multiple Targets vs.
Single Multi-Component Target
Single Multi-Component Target
Pure metal or binary alloy targets
(existing technology)- Equipment complexity and size ↑
- High-temperature process
- Low uniformity and reliability
- Limitation in applying >3 components
- Powder mixing sintering (target density 96% ↓)
- Multi-nanolayer structure deposited
(existing technology)- Equipment complexity and size ↑
- High-temperature process
- Low uniformity and reliability
- Limitation in applying >3 components
- Powder mixing sintering (target density 96% ↓)
- Multi-nanolayer structure deposited
Multi-component single alloy target
(EML’s technology)- Simple equipment and process
- Low-temperature process possible
- High uniformity and reliability
- Diverse compositions and alloys
- Alloy powder → sintering (target density 99%↑)
- Nanocomposite layer deposited
(EML’s technology)- Simple equipment and process
- Low-temperature process possible
- High uniformity and reliability
- Diverse compositions and alloys
- Alloy powder → sintering (target density 99%↑)
- Nanocomposite layer deposited
Arc Ion Plating (AIP)
PVD Equipment
PVD Equipment
PVD Targets
Planar (rectangular/disk) & Cylindrical Rotary Shapes
Planar (rectangular/disk) & Cylindrical Rotary Shapes
Nanocomposite Coating
Technology
- Development and implementation of nanocomposite coating with two or more simultaneous properties (e.g., heat resistance, oxidation resistance, electric resistance, low friction, wear resistance, etc., 4 applied & 1 granted/registered patents)
Evolution of Functional
PVD Coating Technology
PVD Coating Technology
EML’s Technology
for Nano-Composite Coating
for Nano-Composite Coating
Materials
| Materials | Purity | Shape/Size | Materials | Purity | Shape/Size |
|---|---|---|---|---|---|
| Al | >4N | Disk, Plate, Rotary / Customization | Zr | >2N5 | Disk, Plate, Rotary / Customization |
| Al Alloy | >4N | Zr Alloy | >2N5 | ||
| Ni | >4N | Fe | >3N | ||
| Ni Alloy | >3N | Fe Alloy | >3N | ||
| Cr | >3N5 | Mo | >3N | ||
| Cr Alloy | >3N | Mo Alloy | >3N | ||
| Ti | >4N | Co | >3N | ||
| Ti Alloy | >3N | Co Alloy | >3N | ||
| Cu | >4N | Ceramic | |||
| Cu Alloy | >3N | Customization | |||
Pure metal & Alloy target list
| Applications | Formula | Purity | Shape/Size |
|---|---|---|---|
| Pure Metal | Al, Au, Cr, Co, Cu, Mo, Nb, Pt, Si, Ta, Zr, etc. | 99.0 ~ 99.999 | Disk, Plate, Rotary / Customization |
| Low-friction & wear-resistant coating targets | AlCr | 99.95 | Disk, Plate / Customization |
| ZrCrSi | 99.95 | Disk, Plate, Rotary / Customization | |
| ZrCuSi | 99.95 | ||
| ZrMoTi | 99.95 | ||
| Hard coating targets for tools/molds | TiAlSi | 99.95 | Disk / Customization |
| TiAlCr | 99.95 | ||
| AlCr | 99.95 | ||
| Targets for flexible/super-elastic electrode applications | AlRe | 99.95 | Disk / Customization |
| AlTiN | 99.95 | ||
| TiAlN | 99.95 | ||
| ZrCrSi | 99.95 | Disk, Plate, Rotary / Customization | |
| High melting point/ high entropy alloy targets | Mo | 99.95 | Disk, Plate, Rotary / Customization |
| MoTi | 99.95 | ||
| MoZrTiSi | 99.95 | Disk / Customization | |
| TiCrAlCuNi | 99.95 |
Ceramic target list
| Applications | Formula | Purity | Shape/Size |
|---|---|---|---|
| Aluminum oxide | Al₂O₃ | 99.99 | Disk / Customization |
| Cerium oxide | CeO₃ | 99.9 | |
| Chromium oxide | Cr₂O₃ | 99.8 | |
| Gallium oxide | Ga₂O₃ | 99.999 | |
| Hafnium oxide | HfO₂ | 99.995 | |
| HfCaO | 99.0 | ||
| HfY₂O₃ | 99.0 | ||
| Lanthanum oxide | La₂O₃ | 99.99 | |
| Lithium oxide Lithium niobate |
Li₂O₃ | 99.95 | |
| LiNbO₃ | 99.9 | ||
| Silicon (dioxide, monoxide) |
SiO₂ | 99.995 99.97 |
|
| SiO | 99.99 99.9 |
||
| Titanium oxide | TiO₂ | 99.995 99.9 |
|
| Yttrium aluminum oxide | Y₃Al₅O₁₂ | 99.9 | |
| Yttrium iron oxide | Y₃Fe₅O₁₂ | 99.99 | |
| Yttrium oxide | Y₂O₃ | 99.9 | |
| Zinc oxide | ZnO | 99.99 | |
| Zirconium oxide | ZrO₂CaO | 99.0 | |
| ZrO₂Y₂O₃ | 99.0 |